booktalesy Chapter 366 Fourfold Exposure! This Doesn't Conform to Physics
Chapter 366 Fourfold Exposure! This Doesn't Conform to Physics
After watching for a while, Wang Jianping stood up, fascinated, and asked the staff member wearing the National Natural Science Foundation badge with some excitement.
"How many times was this equipment used for multiple exposures?"
The man glanced at him and then laughed: "Mr. Wang, you could tell right away."
Fourfold!
Quadruple exposure is an extremely demanding process for a dry 193nm lithography machine, representing the limit of mass production...
As for the six-fold exposure in the laboratory, it is meaningless, and the yield will be so low that it is not worth producing.
That was purely for the sake of breaking through!
Wang Jianping stood there in surprise, unsure of what the answer meant, even as a professional.
Although quadruple exposure does not have the limit of six exposures, it still results in a low yield rate under extreme production conditions. Even with perfected processes, the highest yield is only around 70%.
"Quadruple exposure? 193nm, what is the precision of quadruple exposure for 14nm overlay? You guys are crazy."
"The superposition error is controlled within 2nm!"
Wang Jianping's eyes widened again, and then he frowned deeply.
"2nm, 193nm wavelength, quadruple exposure to achieve 2nm? Have you unearthed Newton's magic?"
After all, based on his professional knowledge, this simply defies the laws of physics.
He quickly came up with another idea, and then he grabbed the staff member tightly: "What alignment method are you using?"
The man didn't answer. Instead, he pulled a technical manual from a folder next to him, flipped to a certain page, and handed it to Wang Jianping.
After taking it, Wang Jianping glanced at the technical parameters on that page, then stopped, his hand trembling slightly.
"This...this is..."
"Standard lithography machines don't come with this algorithm; this is a customized version developed by Transsion Holdings."
However, if you want to know the specific algorithm details, you need to sign a "non-disclosure agreement" to view them.
The man gently interrupted him.
"But I can tell you a publicly available statistic: this machine ran on Transsion's production line for more than 60 days."
Total wafer production exceeded 15000 pieces, but the process was controlled at 22nm, with a yield rate of 85%.
The head of the acceptance team was Professor Wang Zhihua, your advisor at Kyoto University.
You can review the reports he signed at any time.
Wang Jianguo's lips moved. Given the current relationship between Huaxin International and Transsion Technology, that confidentiality agreement was undoubtedly a job-hopping agreement...
Finally, he turned around and took one last look at the lithography machine.
The machine is white, with "China National Semiconductor Fund" printed on it, along with a prominent serial number NSE-CX14C [National Semiconductor Equipment Series, MStar 14C].
He reached out and gently touched the number, as if touching the forehead of a newborn.
For China, this lithography machine is like a newborn baby, only Huaxing's newborn baby is growing a bit too fast.
"We've been waiting for this machine for 20 years."
His voice was low, as if he were talking to himself, but his feelings... were incredibly excited.
He slowly withdrew his hand from the fuselage, the excitement in his eyes not yet fully subsided, he kept turning back to look at himself as he took a step...
He suddenly swayed, but his breathing steadied first.
He turned to look at the staff member next to him. He couldn't believe the result just now, but now it had turned into countless expectations and pleas. However, the urgency in his bones could not be hidden.
"I want to ask one more honest question: when will the MStar 14A begin mass production and supply?"
What's the price? Can Huaxing International sign a letter of intent and put us on the supply queue?
Why was Wang Jianguo's question so direct and so humble?
This was because Huaxin International had previously leaked rumors about a breakthrough in domestically produced lithography machines, attempting to attract attention for itself...
As a result, they had no involvement with the first lithography machine, and they didn't even receive a response when they inquired about placing an order.
So in their eyes, he wasn't the powerful CEO of Huaxin International, but a junior employee paying the price for his mistakes.
Seeing him like this, the staff sighed. If only they had known this would happen, they wouldn't have done it in the first place.
However, Transsion doesn't harbor that much animosity towards Huaxin International; teaching them a lesson is enough...
"Mr. Wang, this MStar 14 series lithography machine is a mass-production equipment developed by Transsion Technology under the leadership of the National Semiconductor Industry Investment Fund. The supply list is intended for all compliant wafer foundries."
Once the technology matures, it will be made available to global partners.
However, the initial batch is still targeted at the global market, and Huaxin International, as a leading domestic company, is naturally on the priority supply list.
Before the staff member could finish speaking, and just as Wang Jianping was about to breathe a sigh of relief, the other party suddenly changed the subject and brought up the most difficult problem at present.
"There is one problem right now: the production capacity of the first batch of dedicated production lines has been completely locked up."
This lithography machine is expected to have an annual production capacity of eight units, all of which have been allocated to Transsion's wafer fabs for mass production of the mature 22nm process and further ramp-up verification of the 14nm process.
For subsequent batches, production capacity will need to be adjusted, which will take approximately 18 months.
According to standard procedures, your company would need to wait in line for delivery, and it would take at least a year and a half to receive the first domestically produced equipment.
"18 months..."
Wang Jianping frowned again, not quite sure what 18 months meant.
And this is assuming there are some potential problems, meaning they won't receive it until at least the end of 2014 or mid-2015, by which time the entire global semiconductor industry will have moved to 14nm...
But they are still lagging behind.
They will still only be able to manufacture mature processes, and they will not be able to use domestically produced equipment to enter the high-end market.
He took half a step forward, his tone becoming more complex:
"Comrade!"
When he uttered those two words, the staff's hearts skipped a beat.
"I know that production capacity is tight, and I know that this equipment cannot be separated from Transsion's help. Prioritizing their supply to improve semiconductors is very important."
But Huaxin International also needs this equipment, and we also need to verify some advanced technologies... We've been laying the groundwork for a long time for the breakthrough in 28nm process, but we're still stuck on the lithography machine stage.
The staff member's heart skipped a beat.
Huaxin International does have plans for 28nm, but after a long period of preparation, he had never actually heard of it...
Seeing the change in the other party's emotions, Wang Jianping immediately pressed his advantage.
"We are willing to prepay for the equipment in full, sign the strictest confidentiality agreement unconditionally, and share all subsequent process debugging data with Transsion and the National Integrated Circuit Industry Investment Fund."
Regarding production line layout and personnel adjustments, we fully cooperate with the lead team's requirements!
After all, it's not like we haven't done this before, even with full payment. It's just that in the past, even with full payment, we weren't guaranteed to receive the goods. But this time, as long as we pay in full, there will be absolutely no problem...
Wang Jianping can make the decision on this small matter!